Real-Time AMC Monitoring in Lithography to Prevent Defects
The successful implementation of advanced litho techniques has meant that the roadmap’s major challenges are no longer resolution dependent…
Category: Molecular
Planning and Installing an Environmental Monitoring System
Regulations have lead to a requirement for an automated, remote monitoring solution. But what are the components of this solution, and how are they implemented? The FacilityPro Environmental Monitoring System follows this format: design, build, install, test, and validate.
Molecular Contamination Monitoring for Lithography
A dedicated, point-of-use monitor offers the following advantages over a conventional multipoint sampling system: continuous monitoring, no missed contamination events, sample tubing lengths reduced from 20 – 30 meters to 2 – 3 meters, and 5 – 10x better sensitivity.